- 英文名称
- Hexaphenylcyclotrisilazane
- 分子式
- C36H33N3Si3
- 分子量
- 591.93
- 中文别名
- 六苯基环三硅氮烷; 1,2,2,3,4,4-hexaphenyl-1,3,5,2,4,6-triazatrisilinane; 2,2,4,4,6,6-Hexaphenylcyclotrisilazane; Cyclotrisilazane, 2,2,4,4,6,6-hexaphenyl-; 1H,3H,5H-Hexaphenylcyclotrisilazan; Hexaphenyl-cyclo-trisilazan; 2,2,4,4,6,6-hexaphenyl-cyclotrisilazane
- 用途
- 六苯基环三硅氮烷可作为氮化硅和碳氮化硅沉积的前体用于半导体工业中,并作为光刻胶中的添加剂。